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ISSN : 1598-6721(Print)
ISSN : 2288-0771(Online)
The Korean Society of Manufacturing Process Engineers Vol.10 No.6 pp.146-151

A Three-Dimensional CFD Study on the Air Flow Characteristics in a Wax Spin Coater for Silicon Wafer Manufacturing

Yong-Ki Kim, Dong-Joo Kim, Alisher Umarov, Kyoung-Jin Kim, Jun-Young Park


실리콘 웨이퍼 생산공정용 왁스 스핀코팅장치 내 기류 특성에 대한 3차원 전산유동해석

김용기, 김동주, 우마로프 알리세르, 김경진, 박준영